Impact of Organic Contamination on Thin Gate Oxide Quality
De Gendt, Stefan, Knotter, D. Martin, Kenis, Karine, Depas, Michel, Meuris, Marc, Mertens, Paul W., Heyns, Marc M.Том:
37
Журнал:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.37.4649
Date:
September, 1998
Файл:
PDF, 1.22 MB
1998