[IEEE 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual - Phoenix, AZ, USA (2007.04.15-2007.04.19)] 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual - Investigation of via Bottom Barrier Integrity Impact on Electromigration
Aubel, O., Thierbach, S., Koschinsky, F., Feustel, F., Hau-Riege, C.S., Zistl, C.Рік:
2007
Мова:
english
DOI:
10.1109/relphy.2007.369994
Файл:
PDF, 2.23 MB
english, 2007