[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Eight-beam piezoresistive accelerometer fabricated by using a selective porous silicon etching method
Jun-Hwan Sim,, Sung-Ho Hahm,, Jung-Hee Lee,, Jong-Hyun Lee,, In-Sik Yu,, Jin-Sup Kim,Том:
2
Рік:
1997
Мова:
english
DOI:
10.1109/sensor.1997.635419
Файл:
PDF, 447 KB
english, 1997