[IEEE Eleventh International Vacuum Microelectronics Conference. IVMC'98 - Asheville, NC, USA (19-24 July 1998)] Eleventh International Vacuum Microelectronics Conference. IVMC'98 (Cat. No.98TH8382) - Effects of phase and thickness of cobalt silicide on field emission properties of silicon emitters
Young Joon Yoon,, Gi Bum Kim,, Eung Joon Chi,, Jae Yeob Shim,, Hong Koo Baik,Рік:
1998
Мова:
english
DOI:
10.1109/ivmc.1998.728774
Файл:
PDF, 159 KB
english, 1998