[IEEE 2012 IEEE International Frequency Control Symposium (FCS) - Baltimore, MD, USA (2012.05.21-2012.05.24)] 2012 IEEE International Frequency Control Symposium Proceedings - Cross-sectional dilation mode resonator with very high electromechanical coupling up to 10% using AlN
Zuo, Chengjie, Yun, Changhan H., Stephanou, Philip J., Park, Sang-June, Lo, Chi-Shun T., Mikulka, Robert, Lan, Je-Hsiung J., Velez, Mario F., Shenoy, Ravindra V., Kim, Jonghae, Nowak, Matthew M.Рік:
2012
Мова:
english
DOI:
10.1109/fcs.2012.6243598
Файл:
PDF, 873 KB
english, 2012