[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - Line-profile and critical dimension measurements using a normal incidence optical metrology system
Weidong Yang,, Lowe-Webb, R., Korlahalli, R., Zhuang, V., Sasano, H., Wei Liu,, Mui, D.Рік:
2002
Мова:
english
DOI:
10.1109/asmc.2002.1001586
Файл:
PDF, 597 KB
english, 2002