[IEEE 2013 International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2013.07.1-2013.07.5)] 2013 14th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices - Structural properties of silicon oxide prepared by high-power PECVD
Sidorov, Denis I., Mushinsky, Sergey S., Shevtsov, Denis I.Рік:
2013
Мова:
english
DOI:
10.1109/edm.2013.6641936
Файл:
PDF, 502 KB
english, 2013