Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 2
Inductively coupled plasma etching of high aspect ratio two-dimensional photonic crystals in Al-rich AlGaAs and AlGaAsSb
Larrue, A., Belharet, D., Dubreuil, P., Bonnefont, S., Gauthier-Lafaye, O., Monmayrant, A., Lozes-Dupuy, F., Moumdji, S.Том:
29
Рік:
2011
Мова:
english
Журнал:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3549125
Файл:
PDF, 694 KB
english, 2011
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