Neutral gas temperature measurements of high-power-density fluorocarbon plasmas by fitting swan bands of C[sub 2] molecules
Bai, Bo, Sawin, Herbert H., Cruden, Brett A.Том:
99
Рік:
2006
Мова:
english
Журнал:
Journal of Applied Physics
DOI:
10.1063/1.2159545
Файл:
PDF, 403 KB
english, 2006