Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared
N. Hilfiker, James, Bungay, Corey L, Synowicki, Ron A., Tiwald, Thomas E., Herzinger, Craig M., Johs, Blaine, Pribil, Greg K., Woollam, John A.Том:
21
Рік:
2003
Мова:
english
Журнал:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1569928
Файл:
PDF, 412 KB
english, 2003