Influence of Subsurface Hybrid Material Growth on the Mechanical Properties of Atomic Layer Deposited Thin Films on Polymers
Sun, Yujie, Padbury, Richard P., Akyildiz, Halil I., Goertz, Matthew P., Palmer, Jeremy A., Jur, Jesse S.Том:
19
Мова:
english
Журнал:
Chemical Vapor Deposition
DOI:
10.1002/cvde.201207042
Date:
June, 2013
Файл:
PDF, 937 KB
english, 2013