Circuit-level reliability requirements for Cu metallization
Alam, S.M., Gan, C.L., Wei, F.L., Thompson, C.V., Troxel, D.E.Том:
5
Мова:
english
Журнал:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2005.853507
Date:
September, 2005
Файл:
PDF, 438 KB
english, 2005