Influence of the incident angle of energetic carbon ions on the properties of tetrahedral amorphous carbon (ta-C) films
Liu, Dongping, Benstetter, Günther, Lodermeier, Edgar, Vancea, JohannТом:
21
Рік:
2003
Мова:
english
Журнал:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1597888
Файл:
PDF, 896 KB
english, 2003