Simulation of pressure effects in a multipulsed nitrogen plasma source ion implantation system
Bear, Michael J.Том:
15
Мова:
english
Журнал:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.580666
Date:
July, 1997
Файл:
PDF, 440 KB
english, 1997