[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing
Nishino, Hitoshi, Yoshida, Shinya, Kojima, Akira, Ikegami, Naokatsu, Koshida, Nobuyoshi, Tanaka, Shuji, Esashi, MasayoshiРік:
2014
Мова:
english
DOI:
10.1109/memsys.2014.6765678
Файл:
PDF, 1.26 MB
english, 2014
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