Investigation of lateral straggling of Hg ions in Si3N4 by normal and glancing angle Rutherford backscattering
Wang, Ke-Ming, Zao, Qing-Tai, Shi, Bo-Rong, Wang, Zhong-Lie, Liu, Xiang-Dong, Liu, Ji-TianТом:
58
Рік:
1991
Мова:
english
Журнал:
Applied Physics Letters
DOI:
10.1063/1.105205
Файл:
PDF, 496 KB
english, 1991