Young’s modulus measurement of two-photon polymerized micro-cantilevers by using nanoindentation equipment
Cicha, Klaus, Koch, Thomas, Torgersen, Jan, Li, Zhiquan, Liska, Robert, Stampfl, JürgenТом:
112
Рік:
2012
Мова:
english
Журнал:
Journal of Applied Physics
DOI:
10.1063/1.4764330
Файл:
PDF, 1.07 MB
english, 2012