[IEEE 2009 International Symposium on VLSI Design, Automation and Test (VLSI-DAT) - Hsinchu, Taiwan (2009.04.28-2009.04.30)] 2009 International Symposium on VLSI Design, Automation and Test - Coupling- and ECP-aware metal fill for improving layout uniformity in copper CMP
Yu-Lun Co,, Chen, Hung-Ming, Yi-Kan Cheng,Рік:
2009
Мова:
english
DOI:
10.1109/vdat.2009.5158110
Файл:
PDF, 408 KB
english, 2009