[IEEE 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Waikiki Beach, HI, USA (2014.4.13-2014.4.16)] The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Development of catalytic etching using dual materials
Huang, Mao-Jung, Chu, Nien-Nan, Chang, Chun-Ming, Shiao, Ming-Hua, Hsiao, Chien-NanРік:
2014
Мова:
english
DOI:
10.1109/nems.2014.6908872
Файл:
PDF, 1.91 MB
english, 2014
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