Surface loss probability of atomic hydrogen for different electrode cover materials investigated in H2-Ar low-pressure plasmas
Sode, M., Schwarz-Selinger, T., Jacob, W., Kersten, H.Том:
116
Мова:
english
Журнал:
Journal of Applied Physics
DOI:
10.1063/1.4886123
Date:
July, 2014
Файл:
PDF, 748 KB
english, 2014