A Low-Power-Consumption Out-of-Plane Electrothermal Actuator
Girbau, David, Llamas, Marco Antonio, Casals-Terre, Jasmina, Simo-Selvas, Xavier, Pradell, LluÍs, Lazaro, AntonioТом:
16
Мова:
english
Журнал:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.896714
Date:
June, 2007
Файл:
PDF, 945 KB
english, 2007