[IEEE 2008 IEEE International Reliability Physics Symposium (IRPS) - Phoenix, AZ, USA (2008.04.27-2008.05.1)] 2008 IEEE International Reliability Physics Symposium - Comprehensive reliability analysis of CoWP Metal Cap unit processes for high volume production in sub-μm dimensions
Aubel, O., Thierbach, S., Seidel, R., Freudenberg, B., Meyer, M.A., Feustel, F., Poppe, J., Nopper, M., Preusse, A., Zistl, C., Weide-Zaage, K.Рік:
2008
Мова:
english
DOI:
10.1109/relphy.2008.4558983
Файл:
PDF, 322 KB
english, 2008