[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - The prediction of aerial image and CD variation due to imperfect mask in extreme ultraviolet lithography
Jong-Hoi Kim,, Sang-Jin Lee,, Joo-Heon Lee,, Young-Keun Kwon,, Myung-Sul Lee,, Seung-Wook Park,, Il-Sin An,, Hye-Keun Oh,Рік:
2003
Мова:
english
DOI:
10.1109/imnc.2003.1268536
Файл:
PDF, 46 KB
english, 2003