Negative-type extreme ultraviolet Resist Materials based on Water-Wheel-like Cyclic Oligomer (Noria)
Seki, Hiroyuki, Kato, Yuki, Kudo, Hiroto, Oizumi, Hiroaki, Itani, Toshiro, Nishikubo, TadatomiТом:
49
Мова:
english
Журнал:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.06GF06
Date:
June, 2010
Файл:
PDF, 277 KB
english, 2010