[IEEE 2004 Semiconductor Manufacturing Technology Workshop - Hsinchu, Taiwan (9-10 Sept. 2004)] 2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) - Machine grouping algorithm for stepper back-up and an empirical study
Chia-Yu Hsu,, Chen-Fu Chien,, Yung-Chen Tsao,, Cheng-Yi Li,Рік:
2004
Мова:
english
DOI:
10.1109/smtw.2004.1393757
Файл:
PDF, 299 KB
english, 2004