Phase Formation and Morphology of Nickel Silicide Thin Films Synthesized by Catalyzed Chemical Vapor Reaction of Nickel with Silane
Peter, Antony Premkumar, Meersschaut, Johan, Richard, Olivier, Moussa, Alain, Steenbergen, Johnny, Schaekers, Marc, Tőkei, Zsolt, Van Elshocht, Sven, Adelmann, ChristophТом:
27
Мова:
english
Журнал:
Chemistry of Materials
DOI:
10.1021/cm503810p
Date:
January, 2015
Файл:
PDF, 3.15 MB
english, 2015
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