Electrostatically actuated bilayer polyimide-based microresonators
Zhang, Guandong, Chu, Virginia, Conde, Joao PedroТом:
17
Мова:
english
Журнал:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/4/017
Date:
April, 2007
Файл:
PDF, 546 KB
english, 2007