Role of Ultra Thin SiOx Layer on Epitaxial YSZ/SiOx/Si Thin Film
Kiguchi, Takanori, Wakiya, Naoki, Shinozaki, Kazuo, Mizutani, NobuyasuТом:
51
Мова:
english
Журнал:
Integrated Ferroelectrics
DOI:
10.1080/10584580390229815
Date:
January, 2003
Файл:
PDF, 766 KB
english, 2003