Double-Polarity Selective Area Growth of GaN Metal Organic Vapor Phase Epitaxy by Using Carbon Mask Layers
Fujita, Yohei, Takano, Yasushi, Inoue, Yoku, Sumiya, Masatomo, Fuke, Shunro, Nakano, TakayukiТом:
52
Мова:
english
Журнал:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.52.08jb26
Date:
August, 2013
Файл:
PDF, 770 KB
english, 2013