[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Challenges with Respect to High-k/Metal Gate Stack Etching and Cleaning
Vos, Rita, Arnauts, Sophia, Bovie, Inge, Onsia, Bart, Garaud, Sylvain, Xu, Kaidong, Hongyu, Yu, Kubicek, Stefan, Rohr, Erika, Schram, Tom, Veloso, Anabela, Conard, Thierry, Leunissen, Leonardus H.A.,Том:
11
Рік:
2007
Мова:
english
DOI:
10.1149/1.2779567
Файл:
PDF, 501 KB
english, 2007
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