Carbon Incorporation on (1\bar101) Facet of AlGaN in Metal Organic Vapor Phase Epitaxy
Koide, Norikatsu, Hikosaka, Toshiki, Honda, Yoshio, Yamaguchi, Masahito, Sawaki, NobuhikoТом:
45
Мова:
english
Журнал:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.7655
Date:
October, 2006
Файл:
PDF, 263 KB
english, 2006