Resilient Batch-Fabricated Planar Arrays of Miniaturized Langmuir Probes for Real-Time Measurement of Plasma Potential Fluctuations in the HF to Microwave Frequency Range
Chimamkpam, Emmanuel F. C., Field, Ella S., Akinwande, Akintunde Ibitayo, Velasquez-Garcia, Luis FernandoТом:
23
Мова:
english
Журнал:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2306631
Date:
October, 2014
Файл:
PDF, 1.75 MB
english, 2014
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