[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Al/La2O3 Analysis of Post Metallization Annealed MISFET by XPS
Kuroki, Yusuke, Ng, Jin Aun, Kakushima, Kuniyuki, Sugii, Nobuyuki, Tsutsui, Kazuo, Iwai, H.Том:
1
Рік:
2006
Мова:
english
DOI:
10.1149/1.2209273
Файл:
PDF, 337 KB
english, 2006