SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Optical Measurement Systems for Industrial Inspection IV - A focus sensor for an application in a nanopositioning and nanomeasuring machine
Mastylo, Rostyslav, Dontsov, Denis, Manske, Eberhard, Jager, Gerd, Osten, Wolfgang, Gorecki, Christophe, Novak, Erik L.Том:
5856
Рік:
2005
Мова:
english
DOI:
10.1117/12.612887
Файл:
PDF, 1.13 MB
english, 2005
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