Streamlined cryogenic deep reactive ion etching protocol for hybrid micronozzle arrays
Erten, Ahmet, Makale, Milan, Lu, Xuekun, Fruhberger, Bernd, Kesari, Santosh, Esener, SadikТом:
21
Мова:
english
Журнал:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/10/105001
Date:
October, 2011
Файл:
PDF, 866 KB
english, 2011