Accuracy Analysis of Quality Factor Measurement Based on Time Domain Method for MEMS Resonators
Wang, Ling Yun, Du, Xiao Hui, Su, Yuan Zhe, He, Jie, Li, Yi Pan, Wu, De Zhi, Sun, Dao HengТом:
609-610
Мова:
english
Журнал:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.609-610.1131
Date:
April, 2014
Файл:
PDF, 704 KB
english, 2014