[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Differential micro-Pirani gauge for monitoring MEMS wafer-level package
Chen, Yang-Che, Lin, Wei-Chu, Wang, Hung-Sen, Fan, Chen-Chih, Lin, Keaton C.-H., Chou, Bruce C.S., Liu, Mingo C.-M.Рік:
2015
Мова:
english
DOI:
10.1109/MEMSYS.2015.7050893
Файл:
PDF, 1.69 MB
english, 2015
File converter
Більше результатів пошуку
More benefits 
