Oxide-nitride-oxide Dielectric Stacks with Embedded Si-nanoparticles Fabricated by Low-energy Ion-beam-synthesis
Ioannou-Sougleridis, Vassilis, Dimitrakis, Panagiotis, Vamvakas, Vassilios Em., Normand, Pascal, Bonafos, Caroline, Schamm, Sylvie, Ben Assayag, GerardТом:
997
Мова:
english
Журнал:
MRS Proceedings
DOI:
10.1557/PROC-0997-I03-10
Date:
January, 2007
Файл:
PDF, 1.20 MB
english, 2007