Preliminary Studies for Precision Polishing of Micro Structured Mold by Using Three-Dimensional Low Frequency Vibration Utilizing Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism
Chee, Sze Keat, Suzuki, Hirofumi, Uehara, Junichi, Yano, Takeshi, Higuchi, ToshiroТом:
565
Мова:
english
Журнал:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.565.231
Date:
September, 2012
Файл:
PDF, 1.51 MB
english, 2012
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