SiGe channels for higher mobility CMOS devices
Naumann, Andreas, Kelwing, Torben, Trentzsch, Martin, Kronholz, Stephan, Kammler, Thorsten, Flachowsky, Stefan, Herrmann, Tom, Kücher, Peter, Bartha, Johann WТом:
1194
Мова:
english
Журнал:
MRS Proceedings
DOI:
10.1557/PROC-1194-A04-04
Date:
January, 2009
Файл:
PDF, 191 KB
english, 2009