[ECS 23rd Symposium on Microelectronics Technology and Devices - Gramado, Brazil (September 1 - September 4, 2008)] ECS Transactions - Etching Characteristics and Surface Morphology of Nitrogen-Doped a-SiC Films Prepared by RF Magnetron Sputtering
Fraga, Mariana A., Pessoa, Rodrigo S., Oliveira, Ivo C., Massi, Marcos, Maciel, Homero S., Martinho, Herculano, Dos Santos Filho, Sebastião G., Marcuzzo, Jossano S.Том:
14
Рік:
2008
Мова:
english
DOI:
10.1149/1.2956052
Файл:
PDF, 578 KB
english, 2008
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