Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays
Shavezipur, Mohammad, Harrison, Kimberly, Lee, William Scott, Mitra, Subhasish, Wong, H.-S. Philip, Howe, Roger T.Том:
24
Мова:
english
Журнал:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2335157
Date:
June, 2015
Файл:
PDF, 1012 KB
english, 2015