Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators
Tsai, Jui-che, Lu, Li-Cheng, Hsu, Wei-Chi, Sun, Chia-Wei, Wu, Ming CТом:
18
Мова:
english
Журнал:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/1/015015
Date:
January, 2008
Файл:
PDF, 1.12 MB
english, 2008