Influence of Lapping Parameters on 6H-SiC Crystal Substrate (0001) C Surface Based on Diamond Particle
Su, Jian Xiu, Liu, Xing Long, Zhang, Zhu Qing, Liu, Zhi XiangТом:
565
Мова:
english
Журнал:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.565.237
Date:
September, 2012
Файл:
PDF, 282 KB
english, 2012