Light confinement effect of nonspherical nanoscale solid immersion lenses
Kim, Myun-Sik, Scharf, Toralf, Nguyen, David, Keeler, Ethan, Rydberg, Skyler, Nakagawa, Wataru, Osowiecki, Gaël, Voelkel, Reinhard, Herzig, Hans PeterТом:
12
Мова:
english
Журнал:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.12.2.023015
Date:
June, 2013
Файл:
PDF, 5.47 MB
english, 2013