SPIE Proceedings [SPIE SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring - San Diego, California (Sunday 6 March 2011)] Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2011 - X-ray diffraction wafer mapping method for SiGe twin defects characterization
Park, Yeonjoon, Kim, Hyunjung, King, Glen, Lee, Kunik, Choi, Sang H., Varadan, Vijay K.Том:
7980
Рік:
2011
Мова:
english
DOI:
10.1117/12.880578
Файл:
PDF, 3.47 MB
english, 2011
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