An Electrothermally Actuated VO2-Based MEMS Using Self-Sensing Feedback Control
Merced, Emmanuelle, Torres, David, Tan, Xiaobo, Sepulveda, NelsonТом:
24
Мова:
english
Журнал:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2317944
Date:
February, 2015
Файл:
PDF, 3.10 MB
english, 2015