Simulation of CMP Process Based on Mixed Elastohydrodynamic Lubrication Model with Layered Elastic Theory
Zhou, Ping, Kang, Ren Ke, Jin, Zhu Ji, Guo, Dong MingТом:
565
Мова:
english
Журнал:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.565.330
Date:
September, 2012
Файл:
PDF, 929 KB
english, 2012