Manipulation of IDT-Actuated Piezoelectric Membrane Actuators by Silicon Clamping
Zaehringer, Sandy, Purr, Julia, Schwesinger, NorbertТом:
518
Мова:
english
Журнал:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.518.215
Date:
February, 2014
Файл:
PDF, 1.98 MB
english, 2014