Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon
Sadamitsu, Shinsuke, Umeno, Shigeru, Koike, Yasuo, Hourai, Masataka, Sumita, Shigeo, Shigematsu, TatsuhikoТом:
32
Журнал:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.3675
Date:
September, 1993
Файл:
PDF, 2.66 MB
1993